Residual Gas Analysers

Residual Gas Analysers


ProtaR

The ProtaR Residual Gas Analyser (RGA) from Protea represents the smallest footprint electronics and maximum performance for value of any RGA on the market.

Protea’s ProtaR RGA is a compact, stable and robustly designed Quadrupole Mass Spectrometer (QMS) instrument incorporating all the latest Quadrupole technology. ProtaR is a useful analytical tool for testing and residual gas analysis in leak testing, semi-conductor, coating and process applications, being able to detect and measure almost all gases with low detection limits and fast response. A mass spectrometer measures the mass-to-charge ratio of the molecules in a sample and by collecting and analysing the mass spectrum we can identity and quantify which molecules are present. The QMS within ProtaR contains a mass filter that is made up of 4 parallel circular rods, hence the name quadrupole.

  • Very quick (millisecond) response time
  • Detects almost any gas
  • Low maintenance costs, with corrosion resistance inlets
  • Advanced chemometrics for multi-gas quantification

ProtaR Residual Gas Analyser

Application Overview

  • Vacuum Furnaces
  • Semi-Conductor Processes
  • Metallurgy
  • Research and Development
  • Vacuum Process
  • Integration with existing vacuum systems

ProtaR is supplied with PAS analytical software for RGA set up and peak analysis. The software allows for ionisation settings and choice of gain settings. Mass scale checks (“Align”) can be carried out. Scans can be carried out at a single mass (leak detection), specific masses (mass jumping) or as a full analogue scan over the mass range of the RGA.

The mass spectra can be plotted on linear or logathrimic scales, as a histogram or bar graph or as a peak-fitted spectrum. Dynamic analysis can be applied, as a minimum just using a simple univariate peak height analysis of specific masses. This will provide an online trend in raw units of partial pressure, ion current etc. Alternatively, a full quantification analysis can be carried out using a number of methods: univariate peak height compensation, multivariate CLS, multivariate PLS.

ProtaR Residual Gas Analyser

ProtaR Residual Gas Analyser
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